Molecular Dynamics Simulations of the Chemical Modification of Polystyrene through CxFy Beam Deposition

Dependence of plasma-induced modification of polymer surfaces on polyatomic ion chemistry

Fluorocarbon plasmas are widely used to chemically modify surfaces and deposit thin films. The deposition of mass selected fluorocarbon ions is useful for isolating the effects specific to polyatomic ions. In this study, the detailed chemical modifications that result from the deposition of beams of polyatomic fluorocarbon ions (C3F5 + and CF3 ) on polystyrene surfaces at experimental fluxes ar...

MD-Simulation of Duty Cycle and TaN Interlayer Effects on the Surface Properties of Ta Coatings Deposited by Pulsed-DC Plasma Assisted Chemical Vapor Deposition

In this work, molecular dynamics (MD) simulations were employed to investigate the effects of duty cycle changes and utilization of tantalum nitride interlayer on the surface roughness and adhesion of Ta coating deposited by pulsed-DC plasma assisted chemical vapor deposition. To examine the simulation results, some selected deposition conditions were experimentally implemented and characterize...

Simulation of Fabrication toward High Quality Thin Films for Robotic Applications by Ionized Cluster Beam Deposition

The most commonly used method for the production of thin films is based on deposition of atoms or molecules onto a solid surface. One of the suitable method is to produce high quality metallic, semiconductor and organic thin film is Ionized cluster beam deposition (ICBD), which are used in electronic, robotic, optical, optoelectronic devices. Many important factors such as cluster size, cluster...

Long Range Corrections to the Vapor-Liquid Equilibrium and Surface Tension of Methane with NVT Molecular Dynamics Simulations

Molecular dynamics simulation of thin film nucleation through molecular cluster beam deposition: Effect of incident angle

Deposition of organic cluster beams on solid substrates leads to the creation of thin films through rapid chemical reactions, which makes the process suitable for study by molecular dynamics (MD) simulations. In this work, angular effects of molecular organic beam deposition are studied extensively through classical MD simulations. The reactive empirical bond potential parameterized by Brenner ...